Handbook of Integrated Circuit Industry
Springer Nature Singapore
Chapter title |
Plasma Etch Equipment
|
---|---|
Chapter number | 68 |
Book title |
Handbook of Integrated Circuit Industry
|
Published by |
Springer, Singapore, January 2024
|
DOI | 10.1007/978-981-99-2836-1_68 |
Book ISBNs |
978-9-81-992835-4, 978-9-81-992836-1
|
Authors |
Pu, Yuan |
Country | Count | As % |
---|---|---|
Unknown | 1 | 100% |
Type | Count | As % |
---|---|---|
Members of the public | 1 | 100% |
Country | Count | As % |
---|---|---|
Unknown | 1 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 1 | 100% |
Readers by discipline | Count | As % |
---|---|---|
Agricultural and Biological Sciences | 1 | 100% |