Handbook of Integrated Circuit Industry
Springer Nature Singapore
Chapter title |
Thin Film Growth Equipment
|
---|---|
Chapter number | 67 |
Book title |
Handbook of Integrated Circuit Industry
|
Published by |
Springer, Singapore, January 2024
|
DOI | 10.1007/978-981-99-2836-1_67 |
Book ISBNs |
978-9-81-992835-4, 978-9-81-992836-1
|
Authors |
Xia, Yang, Ding, Peijun, Zhao, Jinrong, Yin, Bin, Shi, Xiaoping |
Country | Count | As % |
---|---|---|
Unknown | 1 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 2 | 200% |
Readers by discipline | Count | As % |
---|---|---|
Physics and Astronomy | 1 | 100% |
Materials Science | 1 | 100% |