Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
A Technique for Implanting Dopant Distributions in Solids
|
---|---|
Chapter number | 24 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_24 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
J. N. McGruer, D. S. Croft, R. B. Irwin, J. A. Rabel, J. H. Sheehan, W. J. Choyke, N. J. Doyle, McGruer, J. N., Croft, D. S., Irwin, R. B., Rabel, J. A., Sheehan, J. H., Choyke, W. J., Doyle, N. J. |