Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Electrostatic Switch Used for 600 kV Ion Implanter
|
---|---|
Chapter number | 17 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_17 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
J. Wu, S. Yan, S. Yang, X. Deng, Wu, J., Yan, S., Yang, S., Deng, X. |