Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
An Ion Source for Semiconductor Implantation
|
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Chapter number | 13 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_13 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
A. Latuszyński, D. Maczka, Yu. V. Yushkievich, Latuszyński, A., Maczka, D., Yushkievich, Yu. V. |