Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Deposition of Masking Films by Ion-Beam Induced Polymerization
|
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Chapter number | 32 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_32 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
C. R. Fritzsche, K. M. Eisele, Fritzsche, C. R., Eisele, K. M. |