Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Background in ( n, p ) and ( n, α ) Spectrometry
|
---|---|
Chapter number | 38 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_38 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
D. Fink, J. P. Biersack, H. Liebl, Fink, D., Biersack, J. P., Liebl, H. |