Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Beam Annealing of Ion-Implanted Silicon
|
---|---|
Chapter number | 55 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_55 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
J. F. Gibbons, Gibbons, J. F. |