Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Improvements in the Vacuum System of a VDG Accelerator Used for Clean Ion Implantation
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Chapter number | 22 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_22 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
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Authors |
U. K. Chaturvedi, V. Shrinet, S. K. Agrawal, A. K. Nigam, Chaturvedi, U. K., Shrinet, V., Agrawal, S. K., Nigam, A. K. |