Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Buried Silicon-Nitride Layers Formed by Nitrogen-Ion Implantation and High-Temperature Annealing
|
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Chapter number | 47 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_47 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
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Authors |
G. Zimmer, W. Zetzmann, Z. L. Liu, E. Neubert, Zimmer, G., Zetzmann, W., Liu, Z. L., Neubert, E. |