Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Methods to Control Target Heating During Ion Implantation
|
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Chapter number | 43 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_43 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
K. S. Grabowski, R. A. Kant, Grabowski, K. S., Kant, R. A. |
Country | Count | As % |
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Unknown | 1 | 100% |
Readers by professional status | Count | As % |
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Student > Ph. D. Student | 1 | 100% |
Readers by discipline | Count | As % |
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Earth and Planetary Sciences | 1 | 100% |