Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Radiation Annealing of Silicon-Implanted GaAs with a CW Xe Arc Lamp
|
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Chapter number | 56 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_56 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
M. S. Lin, B. C. Hsieh, C. H. Peng, J. C. Lou, Lin, M. S., Hsieh, B. C., Peng, C. H., Lou, J. C. |