Fringe 2009
Springer Berlin Heidelberg
Chapter title |
Optical design of a DOE-based laser interferometer for inspection of MEMS/MOEMS
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Chapter number | 80 |
Book title |
Fringe 2009
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Published by |
Springer, Berlin, Heidelberg, January 2009
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DOI | 10.1007/978-3-642-03051-2_80 |
Book ISBNs |
978-3-64-203050-5, 978-3-64-203051-2
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Authors |
M. Józwik, M. Kujawińska, U.D. Zeitner, K.H. Haugholt, Józwik, M., Kujawińska, M., Zeitner, U.D., Haugholt, K.H. |
Country | Count | As % |
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Unknown | 1 | 100% |
Readers by professional status | Count | As % |
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Student > Ph. D. Student | 1 | 100% |
Readers by discipline | Count | As % |
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Engineering | 1 | 100% |