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Timeline
Chapter title |
Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations
|
---|---|
Chapter number | 57 |
Book title |
X-Ray Lasers 2016
|
Published by |
Springer, Cham, May 2016
|
DOI | 10.1007/978-3-319-73025-7_57 |
Book ISBNs |
978-3-31-973024-0, 978-3-31-973025-7
|
Authors |
H. Urai, T. Makimura, M. Ogawa, Urai, H., Makimura, T., Ogawa, M. |