Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
High Throughput Wafer Handling System for Serial Process Ion Implantation
|
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Chapter number | 14 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_14 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
S. Dinaro, R. Hertel, N. Turner, Dinaro, S., Hertel, R., Turner, N. |