Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Simulation of the Lithographic Properties of Ion-Beam Resists
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Chapter number | 31 |
Book title |
Ion Implantation: Equipment and Techniques
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Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_31 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
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Authors |
K. Haberger, K. Hoffmann, M. Forster, H. Ryssel, Haberger, K., Hoffmann, K., Forster, M., Ryssel, H. |