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TiN/TiSi2 Formation Using TiNx Layer and Its Feasibilities in ULSI

Overview of attention for article published in Japanese Journal of Applied Physics, February 1995
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Mentioned by

patent
28 patents

Citations

dimensions_citation
6 Dimensions

Readers on

mendeley
2 Mendeley
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Title
TiN/TiSi2 Formation Using TiNx Layer and Its Feasibilities in ULSI
Published in
Japanese Journal of Applied Physics, February 1995
DOI 10.1143/jjap.34.982
Authors

Jeong Soo Byun, Chang Reol Kim, Kwan Goo Rha, Jae Jeong Kim, Woo Shik Kim Woo Shik Kim

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 2 100%

Demographic breakdown

Readers by professional status Count As %
Researcher 1 50%
Unknown 1 50%
Readers by discipline Count As %
Materials Science 1 50%
Unknown 1 50%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 04 February 2020.
All research outputs
#7,755,290
of 23,577,761 outputs
Outputs from Japanese Journal of Applied Physics
#1,233
of 6,439 outputs
Outputs of similar age
#16,615
of 77,625 outputs
Outputs of similar age from Japanese Journal of Applied Physics
#12
of 66 outputs
Altmetric has tracked 23,577,761 research outputs across all sources so far. This one is in the 44th percentile – i.e., 44% of other outputs scored the same or lower than it.
So far Altmetric has tracked 6,439 research outputs from this source. They receive a mean Attention Score of 3.7. This one is in the 9th percentile – i.e., 9% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 77,625 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 20th percentile – i.e., 20% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 66 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.