In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor

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New Research: In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor: This paper studied the manufacturing process of Piezoelectric-on-Silicon (POS) substrate which integrates 128° Y–X… https://t.co/9YObVbp7M4

25 Jun 2021

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