大径シリコンウエハ加工用ロータリ研削盤の開発(第2報:切込み機構内蔵砥石スピンドルの基本特性の検討)

Overview of attention for article published in Transactions of the JSME (in Japanese), January 2017

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日本機械学会論文集 Vol. 82(2017) No. 852「大径シリコンウエハ加工用ロータリ研削盤の開発（第２報：切込み機構内蔵砥石スピンドルの基本特性の検討）」https://t.co/bJ51tgQXPT

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