Composition for forming silica based insulating layer, method for manufacturing… Grant US-9096726-B2 United States of America 04 Aug 2015
COMPOSITION FOR FORMING SILICA BASED INSULATING LAYER, METHOD FOR MANUFACTURING… Application US-20120177829-A1 United States of America 12 Jul 2012
Filler for filling a gap and method for manufacturing semiconductor capacitor using the… Grant US-8058711-B2 United States of America 15 Nov 2011