Proceedings of the 4th International Conference on the Industry 4.0 Model for Advanced Manufacturing
Springer International Publishing
Chapter title |
Nano - Precision Systems for Overlay in Advanced Lithography Processes
|
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Chapter number | 1 |
Book title |
Proceedings of the 4th International Conference on the Industry 4.0 Model for Advanced Manufacturing
|
Published in |
Lecture Notes in Mechanical Engineering, June 2019
|
DOI | 10.1007/978-3-030-18180-2_1 |
Book ISBNs |
978-3-03-018179-6, 978-3-03-018180-2
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Authors |
P. Ajay, S. V. Sreenivasan, Ajay, P., Sreenivasan, S. V. |
Country | Count | As % |
---|---|---|
Unknown | 6 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 1 | 17% |
Researcher | 1 | 17% |
Student > Doctoral Student | 1 | 17% |
Unknown | 3 | 50% |
Readers by discipline | Count | As % |
---|---|---|
Engineering | 3 | 50% |
Unknown | 3 | 50% |