Fabrication of the low-k films with tunable k value as spacers in advanced CMOS technology
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (February 2024)
The most recent citing publications are shown below. View all 7 publications that cite this research output on Dimensions.
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (February 2024)
Article in Applied Surface Science (December 2023)
Article in Applied Surface Science (November 2023)