Wet-chemical deposition of metals for advanced semiconductor technology nodes: Rh3+ solution stability and Rh electrodeposition
Article in Electrochimica Acta (August 2024)
The most recent citing publications are shown below. View all 9 publications that cite this research output on Dimensions.
Article in Electrochimica Acta (August 2024)
Article in IEEE Transactions on Semiconductor Manufacturing (April 2024)
Article in Materials (December 2023)