Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications
Article in Advanced Materials Technologies (December 2023)
The most recent citing publications are shown below. View all 15 publications that cite this research output on Dimensions.
Design and simulation of modified 3D-trench electrode sensors
Article in Journal of Instrumentation (November 2023)
TCAD Analysis of Leakage Current and Breakdown Voltage in Small Pitch 3D Pixel Sensors
Article in Sensors (May 2023)